Crystal Orientation Dependent Oxidation Modes at the Buried Graphene-Cu Interface

被引:19
作者
Braeuninger-Weimer, Philipp [1 ]
Burton, Oliver J. [1 ]
Zeller, Patrick [2 ]
Amati, Matteo [2 ]
Gregoratti, Luca [2 ]
Weatherup, Robert S. [3 ]
Hofmann, Stephan [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] Elettra Sincrotrone Trieste SCpA, I-34149 Trieste, Italy
[3] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
基金
英国工程与自然科学研究理事会; 欧盟地平线“2020”;
关键词
WORK FUNCTION; EPITAXIAL GRAPHENE; CONTACT RESISTANCE; POLYCRYSTALLINE CU; COPPER SUBSTRATE; SURFACE; CORROSION; OXYGEN; STRAIN; SPECTROSCOPY;
D O I
10.1021/acs.chemmater.0c02296
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We combine spatially resolved scanning photoelectron spectroscopy with confocal Raman and optical microscopy to reveal how the oxidation of the buried graphene-Cu interface relates to the Cu crystallographic orientation. We analyze over 100 different graphene covered Cu (high and low index) orientations exposed to air for 2 years. Four general oxidation modes are observed that can be mapped as regions onto the polar plot of Cu surface orientations. These modes are (1) complete, (2) irregular, (3) inhibited, and (4) enhanced wrinkle interface oxidation. We present a comprehensive characterization of these modes, consider the underlying mechanisms, compare air and water mediated oxidation, and discuss this in the context of the diverse prior literature in this area. This understanding incorporates effects from across the wide parameter space of 2D material interface engineering, relevant to key challenges in their emerging applications, ranging from scalable transfer to electronic contacts, encapsulation, and corrosion protection.
引用
收藏
页码:7766 / 7776
页数:11
相关论文
共 114 条
[1]   Graphene and two-dimensional materials for silicon technology [J].
Akinwande, Deji ;
Huyghebaert, Cedric ;
Wang, Ching-Hua ;
Serna, Martha I. ;
Goossens, Stijn ;
Li, Lain-Jong ;
Wong, H. -S. Philip ;
Koppens, Frank H. L. .
NATURE, 2019, 573 (7775) :507-518
[2]   Encapsulation of graphene transistors and vertical device integration by interface engineering with atomic layer deposited oxide [J].
Alexander-Webber, Jack A. ;
Sagade, Abhay A. ;
Aria, Adrianus I. ;
Van Veldhoven, Zenas A. ;
Braeuninger-Weimer, Philipp ;
Wang, Ruizhi ;
Cabrero-Vilatela, Andrea ;
Martin, Marie-Blandine ;
Sui, Jinggao ;
Connolly, Malcolm R. ;
Hofmann, Stephan .
2D MATERIALS, 2017, 4 (01)
[3]  
[Anonymous], 2012, CARBON
[4]   INITIAL ADSORPTION-KINETICS OF OXYGEN AND SULFUR ON COPPER CYLINDRICAL CRYSTAL-SURFACES [J].
ARMITAGE, AF ;
WOODRUFF, DP .
SURFACE SCIENCE, 1982, 114 (2-3) :414-430
[5]   Identifying suitable substrates for high-quality graphene-based heterostructures [J].
Banszerus, L. ;
Janssen, H. ;
Otto, M. ;
Epping, A. ;
Taniguchi, T. ;
Watanabe, K. ;
Beschoten, B. ;
Neumaier, D. ;
Stampfer, C. .
2D MATERIALS, 2017, 4 (02)
[6]   Ultrahigh-mobility graphene devices from chemical vapor deposition on reusable copper [J].
Banszerus, Luca ;
Schmitz, Michael ;
Engels, Stephan ;
Dauber, Jan ;
Oellers, Martin ;
Haupt, Federica ;
Watanabe, Kenji ;
Taniguchi, Takashi ;
Beschoten, Bernd ;
Stampfer, Christoph .
SCIENCE ADVANCES, 2015, 1 (06)
[7]   Advanced analysis of copper X-ray photoelectron spectra [J].
Biesinger, Mark C. .
SURFACE AND INTERFACE ANALYSIS, 2017, 49 (13) :1325-1334
[8]   The influence of intercalated oxygen on the properties of graphene on polycrystalline Cu under various environmental conditions [J].
Blume, Raoul ;
Kidambi, Piran R. ;
Bayer, Bernhard C. ;
Weatherup, Robert S. ;
Wang, Zhu-Jun ;
Weinberg, Gisela ;
Willinger, Marc-Georg ;
Greiner, Mark ;
Hofmann, Stephan ;
Knop-Gericke, Axel ;
Schloegl, Robert .
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2014, 16 (47) :25989-26003
[9]   Graphene against corrosion [J].
Boehm, Siva .
NATURE NANOTECHNOLOGY, 2014, 9 (10) :741-742
[10]   Reactive intercalation and oxidation at the buried graphene-germanium interface [J].
Braeuninger-Weimer, Philipp ;
Burton, Oliver ;
Weatherup, Robert S. ;
Wang, Ruizhi ;
Dudin, Pavel ;
Brennan, Barry ;
Pollard, Andrew J. ;
Bayer, Bernhard C. ;
Veigang-Radulescu, Vlad P. ;
Meyer, Jannik C. ;
Murdoch, Billy J. ;
Cumpson, Peter J. ;
Hofmann, Stephan .
APL MATERIALS, 2019, 7 (07)