Thick-film resonant piezo-layers as new gravimetric sensors

被引：37
作者：
Ferrari, V
Marioli, D
Taroni, A
机构：
[1] Dept. of Electronics for Automation, Faculty of Engineering, University of Brescia, I 25123 Brescia
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1997年 / 8卷 / 01期
关键词：
D O I：
10.1088/0957-0233/8/1/007
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Resonant piezo-layers (RPLs) manufactured in thick-film technology are proposed as highly sensitive gravimetric sensors. RPLs rely on a PZT-based screen printable paste which is used for the fabrication of planar elements on alumina substrates behaving as thickness-made resonators. When operated at resonance, these elements are sensitive to a mass load applied on their free moving face, working as resonant microbalances with a frequency output, reaching a mass sensitivity of 114 kHz mg(-1). This paper describes the paste preparation, background theory, frequency-tracking oscillator and the characterization of the sensors and anticipates their application in sensing arrays for chemical measurements.
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页码：42 / 48
页数：7
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