A 2-DOF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM

被引：37

作者：

Fowler, A. G. ^{[1
]}

Laskovski, A. N. ^{[1
]}

Hammond, A. C. ^{[1
]}

Moheimani, S. O. R. ^{[1
]}

机构：

[1] Univ Newcastle Australia, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2012年 / 21卷 / 04期

基金：

澳大利亚研究理事会;

关键词：

Atomic force microscopy; electrostatic actuators; microelectromechanical systems (MEMS); nanopositioning; MICROSCOPE;

D O I：

10.1109/JMEMS.2012.2191940

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new 2-DOF microelectromechanical systems (MEMS)based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 mu m are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.

引用

页码：771 / 773

页数：3

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