A grating type dual-image-element demodulation method based on liquid crystal spatial light modulator for spatial phase-shift-interferometry

被引：1

作者：

Chen, Yu ^{[1
]}

Zhong, Ping ^{[1
]}

Yang, Xutong ^{[1
]}

Xie, Haiying ^{[1
]}

Tang, Xin ^{[2
]}

Yang, Fu ^{[1
]}

Lu, Xuandiyang ^{[1
]}

Xu, Lingxiao ^{[1
]}

机构：

[1] Donghua Univ, Coll Sci, Shanghai 201620, Peoples R China

[2] Donghua Univ, Coll Informat Sci & Technol, Shanghai 201620, Peoples R China

来源：

RESULTS IN PHYSICS | 2022年 / 41卷

基金：

中国国家自然科学基金; 上海市自然科学基金;

关键词：

Phase shift interferometry; Space domain; Liquid crystal spatial light modulator; Phase demodulation; MEMS; INTERPOLATION;

D O I：

10.1016/j.rinp.2022.105934

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A demodulation method based on liquid crystal spatial light modulator for space domain phase-shiftinterferometry is proposed in this paper. In the method, the grating type with dual-image-element mode is used as the phase modulation mode, and the rho-delta algorithm is proposed with which the interference image is recovered from the modulated image. Finally, the demodulation method is introduced by using the gradient projection algorithm and the arctangent operation. Simulation and experimental results show the effectiveness of the proposed method, in which the image recovery error can be reduced by 1.3 grayscales, and the improvement rate of recovery accuracy is 31.38%. In the 90pixels truncation interface, the effective demodulation pixels are 84 pixels, accounting for 93.33%.

引用

页数：13

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