Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition

被引：44
|
作者：
Kim, Jong-Pil [3 ]
Lee, Sang-A [4 ]
Bae, Jong Seong [3 ]
Park, Sung-Kyun [3 ]
Choi, Ung-Chan [1 ,2 ]
Cho, Chae-Ryong [1 ,2 ]
机构：
[1] Pusan Natl Univ, Dept Nanomed Engn, Miryang 627706, South Korea
[2] Pusan Natl Univ, JRC PNU Fraunhofer IGB, Miryang 627706, South Korea
[3] Korea Basic Sci Inst, Nanosurface Technol Res Lab, Pusan 609735, South Korea
[4] Pusan Natl Univ, Dept Phys, Pusan 609735, South Korea
来源：
THIN SOLID FILMS | 2008年 / 516卷 / 16期
关键词：
transparent oxide; room temperature deposition; bandgap; metal dopping; flexible substrate;
D O I：
10.1016/j.tsf.2007.07.095
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We grew 2 wt.% Al-doped ZnO (AZO) films on 5.08 cm-diameter polymer substrates at room temperature by the pulsed laser deposition (PLD) technique added the beam-rastering function. The structural properties, surface morphology, resistivity, mobility and chemical bonding states of AZO/polymer films were measured. The structuring of polymer surface by atmospheric plasma can occur at nm scales and can influence adhesion, optical and wettability properties of the materials. With increasing plasma treatment power, surface hydrophilicity and roughness for PET and PES polymer increased, respectively. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：5223 / 5226
页数：4
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