Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

We previously had developed a particle tracking velocimetry (PTV) technique for making micro flow measurements using digital holograms. The velocity field and the displacement of a micro-particle during the photo-curing of a resin can be measured by a 3-D tracking of the position of a micro-particle, where the particle image is reconstructed by digital holography technique. In this present study, by employing an actual UV-imprint system we measured the fluid motion during a press process and during a UV photo-curing that follows the press process. Thus, we report on a technology of detecting the 3-D position of a particle during the press process and during the photo-curing that follows the press process. The displacement is obtained by the detection of the particle position and is carried out by a digital hologram technique. And it is found that the displacement during the press process happens to be larger than the displacement occurring during the curing process. (C) 2012 Elsevier B.V. All rights reserved.