Evaluation of optical properties of the amorphous carbon film on fused silica

被引:30
作者
Baydogan, ND [1 ]
机构
[1] Istanbul Tech Univ, Inst Energy, TR-34469 Istanbul, Turkey
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2004年 / 107卷 / 01期
关键词
carbon; film deposition; optical properties; plasma processing; thin films;
D O I
10.1016/j.mseb.2003.10.013
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Deposition was done using a pulsed filtered cathodic arc with a graphite cathode. The carbon plasma is fully ionised and condenses on the substrate, forming diamond-like material but with amorphous structure. Optical properties of amorphous carbon films on fused-silica glass were investigated and the curves of optical density have a characteristic band at approximately 950 nm. Changes of the colourimetric quantities were evaluated and compared to uncoated fused silica glass. These changes were investigated as a function of the applied substrate bias voltage using the CIE and CIELAB colour systems. It is suggested that the mechanism of absorption is related to an allowed direct transition at the amorphous carbon films on fused silica glass. The optical energy gap of the amorphous carbon film depends on the bias voltage applied to the substrate holder. The optical colour parameters and optical band gap indicated that there is a relation between the dominant wavelength of the reflectance in the visible range and the wavelength of the optical band gap. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:70 / 77
页数:8
相关论文
共 20 条
[1]   Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs [J].
Anders, A ;
Fong, W ;
Kulkarni, AV ;
Ryan, FW ;
Bhatia, CS .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2001, 29 (05) :768-775
[2]  
[Anonymous], 1994, INTRO RADIOMETRY PHO
[3]  
Bamford C.R., 1977, COLOUR GENERATION CO, V2
[4]   Characterisation of defects in amorphous carbon by electron paramagnetic resonance [J].
Barklie, RC .
DIAMOND AND RELATED MATERIALS, 2001, 10 (02) :174-181
[5]   ELECTRICAL BEHAVIOR AND OPTICAL-PROPERTIES OF SCREEN-PRINTED ITO THIN-FILMS [J].
BESSAIS, B ;
EZZAOUIA, H ;
BENNACEUR, R .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (08) :1671-1678
[6]  
*CEN, 1992, CENTC129IWG9N4E
[7]   The effect of deposition temperature on the properties of Al-doped zinc oxide thin films [J].
Chang, JF ;
Hon, MH .
THIN SOLID FILMS, 2001, 386 (01) :79-86
[8]  
Doremus RobertH., 1994, GLASS SCI
[9]  
FORTNER B, 1997, NUMBER COLOURS SPRIN
[10]  
GIELISSE PJ, 1998, P 3 INT S DIAM FILMS