Transmission Electron Microscopy Analysis of a Threading Dislocation with c+a Burgers Vector in 4H-SiC

被引：39

作者：

Sugawara, Yoshihiro ^{[1
]}

Nakamori, Michio ^{[1
]}

Yao, Yong-Zhao ^{[2
]}

Ishikawa, Yukari ^{[2
]}

Danno, Katsunori ^{[3
]}

Suzuki, Hiroshi ^{[3
]}

Bessho, Takeshi ^{[3
]}

Yamaguchi, Satoshi ^{[4
]}

Nishikawa, Koichi ^{[4
]}

Ikuhara, Yuichi ^{[1
,5
]}

机构：

[1] Japan Fine Ceram Ctr, Nanostruct Res Lab, Nagoya, Aichi 4568587, Japan

[2] Japan Fine Ceram Ctr, Mat Res & Dev Lab, Nagoya, Aichi 4568587, Japan

[3] Toyota Motor Co Ltd, Vehicle Engn Grp, Shizuoka 4101193, Japan

[4] Toyota Cent Res & Dev Labs Inc, Nagakute, Aichi 4801192, Japan

[5] Univ Tokyo, Inst Engn Innovat, Bunkyo Ku, Tokyo 1138656, Japan

来源：

APPLIED PHYSICS EXPRESS | 2012年 / 5卷 / 08期

关键词：

BEAM; DIFFRACTION; DEFECTS;

D O I：

10.1143/APEX.5.081301

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na2O2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [000 (1) over bar] + (1/3)[(2) over bar 110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation. (c) 2012 The Japan Society of Applied Physics

引用

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