Measurement of a large deformable aspherical mirror using SCOTS (Software Configurable Optical Test System)

被引：15

作者：

Huang, Run ^{[1
]}

Su, Peng ^{[1
]}

Horne, Todd ^{[1
]}

Zappellini, Guido Brusa ^{[2
]}

Burge, Jim H. ^{[1
]}

机构：

[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA

[2] Univ Arizona, Steward Observ & LBT, Tucson, AZ 85721 USA

来源：

OPTICAL MANUFACTURING AND TESTING X | 2013年 / 8838卷

关键词：

Deflectometry; optical metrology; aspheric; SCOTS; DEFLECTOMETRY;

D O I：

10.1117/12.2024336

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The software configurable optical test system (SCOTS) is an efficient metrology technology based on reflection deflectometry that uses only an LCD screen and a camera to measure surface slope. The surface slope is determined by triangulations using the coordinates of the display screen, camera and test mirror. We present our recent SCOTS test results concentrated on high dynamic range measurements of low order aberrations. The varying astigmatism in the 91 cm diameter aspheric deformable secondary mirror for the Large Binocular Telescope (LBT) was measured with SCOTS, requiring no null corrector. The SCOTS system was designed on axis with camera and screen aligned on the optical axis of the test mirror with the help of a 6 inch pellicle beam splitter. The on-axis design gives better control of the astigmatism in the test. The high dynamic range of slope provided a measurement of astigmatism with 0.2 mu m rms accuracy in the presence of 231 mu m peak-to-valley (PV) aspheric departure. The simplicity of the test allowed the measurements to be performed at multiple elevation angles.

引用

页数：7