Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates

被引：16

作者：

Haji-Saeed, B ^{[1
]}

Kolluru, R

Pyburn, D

Leon, R

Sengupta, SK

Testorf, M

Goodhue, W

Khoury, J

Drehman, A

Woods, CL

Kierstead, J

机构：

[1] Univ Massachusetts Lowell, Dept Phys, Lowell, MA 01854 USA

[2] Univ Massachusetts Lowell, Dept Elect & Comp Engn, Lowell, MA 01854 USA

[3] USAF, Res Lab, SNHC, Hanscom Air FB, MA 01731 USA

[4] Solid State Sci Corp, Hollis, NH 03049 USA

来源：

APPLIED OPTICS | 2006年 / 45卷 / 12期

关键词：

Electrostatics - Gallium compounds - Interferometers - Lighting - Mirrors - Optical fiber fabrication - Polymeric membranes;

D O I：

10.1364/AO.45.002615

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 mu m thick grid of patterned photoresist supports the 2 mu m thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented. (c) 2006 Optical Society of America.

引用

页码：2615 / 2622

页数：8

共 14 条

[1] A "silicon eye" using MEMS micromirrors [J].

Clark, N .

MRS BULLETIN, 2001, 26 (04) :320-324

[2] PHOTOEMITTER MEMBRANE LIGHT-MODULATOR [J].

FISHER, AD ;

LING, LC ;

LEE, JN ;

FUKUDA, RC .

OPTICAL ENGINEERING, 1986, 25 (02) :261-268

[3]

HAJISAEED B, UNPUB APPL OPT

[4]

Hornbeck LJ, 1990, PROC SOC PHOT OPT EN, V1150, P205, DOI 10.1117/12.962188

[5] Theoretical modeling of the operational mechanism of a photoconductive MEMS spatial light modulator under AC and DC bias [J].

Khoury, J ;

Woods, CL ;

Haji-Saeed, B ;

Sengupta, SK ;

Megherbi, DB ;

Goodhue, W ;

Kierstead, J .

OPTICAL PATTERN RECOGNITION XV, 2004, 5437 :288-292

[6] OPTICALLY ADDRESSED MEMBRANE SPATIAL LIGHT-MODULATOR [J].

PAPE, DR .

OPTICAL ENGINEERING, 1985, 24 (01) :107-110

[7] CHARACTERISTICS OF THE DEFORMABLE MIRROR DEVICE FOR OPTICAL INFORMATION-PROCESSING [J].

PAPE, DR ;

HORNBECK, LJ .

OPTICAL ENGINEERING, 1983, 22 (06) :675-681

[8]

PRESTON K, 1968, P IEEE INT SOL STAT, P100

[9] Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry [J].

Quan, C ;

Wang, SH ;

Tay, CJ ;

Liu, AQ ;

Shang, HM .

OPTICAL ENGINEERING, 2003, 42 (01) :92-97

[10]

REIZMAN F, 1969, P ELECTRO OPTICAL SY, P225

← 1 2 →