Direct writing of carbon nanotube patterns by laser-induced chemical vapor deposition on a transparent substrate

被引:13
作者
Park, J. B. [1 ]
Jeong, M. S. [2 ]
Jeong, S. H. [1 ]
机构
[1] Gwangju Inst Sci & Technol, Dept Mech, Kwangju 500712, South Korea
[2] Gwangju Inst Sci & Technol, Adv Photon Res Inst, Kwangju 500712, South Korea
关键词
Laser chemical vapor deposition; Carbon nanotube; Laser direct writing; Multiple-catalyst-layer; RAMAN-SPECTRA; GROWTH; SURFACE;
D O I
10.1016/j.apsusc.2008.11.070
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Dot array and line patterns of multi-walled carbon nanotubes (MWCNTs) were successfully grown by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. In the proposed technique, a Nd:YVO4 laser with a wavelength of 532 nm irradiates the backside of multiple catalyst layers (Ni/Al/Cr) through a transparent substrate to induce a local temperature rise, thereby allowing the direct writing of dense dot and line patterns of MWCNTs below 10 mm in size to be produced with uniform density on the controlled positions. In this LCVD method, a multiple-catalyst-layer with a Cr thermal layer is the central component for enabling the growth of dense MWCNTs with good spatial resolution. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:4526 / 4530
页数:5
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