Single crystal growth of bulk InGaZnO4 and analysis of its intrinsic transport properties

被引:17
作者
Tanaka, Yusuke [1 ]
Wada, Kazuhiro [1 ]
Kobayashi, Yuki [1 ]
Fujii, Takenori [2 ]
Denholme, Saleem J. [1 ]
Sekine, Ryotaro [1 ]
Kase, Naoki [1 ]
Kimizuka, Noboru [3 ]
Miyakawa, Nobuaki [1 ]
机构
[1] Tokyo Univ Sci, Dept Appl Phys, Katsushika Ku, 6-3-1 Niijuku, Tokyo 1258585, Japan
[2] Univ Tokyo, Cryogen Res Ctr, Bunkyo Ku, 2-11-16 Yayoi, Tokyo 1130032, Japan
[3] Univ Sonora, Dept Invest Polimeros & Mat, Rosales & Luis Encinas S-N, Hermosillo 83000, Sonora, Mexico
来源
CRYSTENGCOMM | 2019年 / 21卷 / 19期
关键词
AMORPHOUS OXIDE SEMICONDUCTOR; ELECTRONIC-STRUCTURE; OPTICAL-PROPERTIES; CARRIER TRANSPORT; FABRICATION; BETA-GA2O3; ORIGINS; FILMS;
D O I
10.1039/c9ce00007k
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The establishment of a reliable method for the growth of bulk In-Ga-Zn-O single crystals is important not only to investigate the fundamental and peculiar properties specific to this material but also for its development for novel functional devices. Large bulk single crystals of InGaZnO4 have been successfully grown using an optical floating zone method under a flow of dry-air at high-pressure. The stoichiometric InGaZnO4 single crystals were obtained at a gas pressure of 0.9 MPa using a feed rod with a Zn-rich composition, where the lattice constants are a = 3.2990(4) angstrom and c = 26.018(3) angstrom as the hexagonal expression for the rhombic system (space group R3m m, No. 166). The as-grown single crystals exhibit a blueish colour, but become transparent after annealing in oxygen. Upon post-annealing, the carrier density, the conductivity in the ab-plane and the mobility at room temperature changes in the range from similar to 10(20) to similar to 10(17) c(-3), from similar to 2000 to similar to 1 S cm(-1), and from similar to 100 to similar to 10 cm(2)/(Vs), respectively. In addition, we found that the conductivity along the c-axis is much lower than that of the ab-plane in InGaZnO4 single crystals, and that the anisotropy increases with decreasing carrier density.
引用
收藏
页码:2985 / 2993
页数:9
相关论文
共 46 条
  • [1] Eliashberg Analysis of Tunneling Experiments: Support for the Pairing Glue Hypothesis in Cuprate Superconductors
    Ahmadi, O.
    Coffey, L.
    Zasadzinski, J. F.
    Miyakawa, N.
    Ozyuzer, L.
    [J]. PHYSICAL REVIEW LETTERS, 2011, 106 (16)
  • [2] Synthesis and crystal structure characterization of InGaZnO4 with a new defect structure
    Assenmacher, W.
    Schnakenburg, G.
    Michiue, Y.
    Kanke, Y.
    Kimizuka, N.
    Mader, W.
    [J]. JOURNAL OF SOLID STATE CHEMISTRY, 2014, 215 : 176 - 183
  • [3] High mobility, dual layer, c-axis aligned crystalline/amorphous IGZO thin film transistor
    Chung, Chen-Yang
    Zhu, Bin
    Greene, Raymond G.
    Thompson, Michael O.
    Ast, Dieter G.
    [J]. APPLIED PHYSICS LETTERS, 2015, 107 (18)
  • [4] Dhanaraj G., 2010, SPRINGER HDB CRYSTAL, DOI DOI 10.1007/978-3-540-74761-1
  • [5] Fujii T, 2002, PHYS REV B, V66, DOI 10.1103/PhysRevB.66.024507
  • [6] Single-crystal growth of Bi2Sr2Ca2Cu3O10+δ (Bi-2223) by TSFZ method
    Fujii, T
    Watanabe, T
    Matsuda, A
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 223 (1-2) : 175 - 180
  • [7] On the bulk β-Ga2O3 single crystals grown by the Czochralski method
    Galazka, Zbigniew
    Irmscher, Klaus
    Uecker, Reinhard
    Bertram, Rainer
    Pietsch, Mike
    Kwasniewski, Albert
    Naumann, Martin
    Schulz, Tobias
    Schewski, Robert
    Klimm, Detlef
    Bickermann, Matthias
    [J]. JOURNAL OF CRYSTAL GROWTH, 2014, 404 : 184 - 191
  • [8] Temperature Dependence of Transistor Characteristics and Electronic Structure for Amorphous In-Ga-Zn-Oxide Thin Film Transistor
    Godo, Hiromichi
    Kawae, Daisuke
    Yoshitomi, Shuhei
    Sasaki, Toshinari
    Ito, Shunichi
    Ohara, Hiroki
    Kishida, Hideyuki
    Takahashi, Masahiro
    Miyanaga, Akiharu
    Yamazaki, Shunpei
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (03)
  • [9] STRUCTURES OF LUFEO3(ZNO)M (M=1, 4, 5 AND 6)
    ISOBE, M
    KIMIZUKA, N
    NAKAMURA, M
    MOHRI, T
    [J]. ACTA CRYSTALLOGRAPHICA SECTION C-CRYSTAL STRUCTURE COMMUNICATIONS, 1994, 50 : 332 - 336
  • [10] Present status of amorphous In-Ga-Zn-O thin-film transistors
    Kamiya, Toshio
    Nomura, Kenji
    Hosono, Hideo
    [J]. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2010, 11 (04)