Impedance Spectroscopy Characterization in Bipolar Ta/MnOx/Pt Resistive Switching Thin Films

被引:8
作者
Park, Chan-Rok [1 ]
Choi, Sun-Young [2 ]
You, Yil-Hwan [1 ]
Yang, Min Kyu [2 ]
Bae, Seung-Muk [1 ]
Lee, Jeon-Kook [2 ]
Hwang, Jin-Ha [1 ]
机构
[1] Hongik Univ, Dept Mat Sci & Engn, Seoul 121791, South Korea
[2] Korea Inst Sci & Technol, Thin Film Mat Res Ctr, Seoul 136791, South Korea
基金
新加坡国家研究基金会;
关键词
RESISTANCE;
D O I
10.1111/jace.12185
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Impedance spectroscopy was applied to MnOx-based thin films prepared in symmetric and asymmetric electrode configurations, i.e., Pt/MnOx/Pt and Ta/MnOx/Pt, respectively. Equivalent circuit analysis suggests the presence of higher resistance surface layers adjacent the electrodes, in addition to a higher conductivity component at central portions of the MnOx thin films. The asymmetric configuration enables the Ta/MnOx interfacial layer to facilitate the redox transport of oxygen ions, where significant changes in resistance with the electric field are responsible for the higher on/off resistance ratio in Ta/MnOx/Pt. The higher dielectric constant and bias-dependent capacitance and resistance support the coexistence of both oxidized surfaces and interfacial layers.
引用
收藏
页码:1234 / 1239
页数:6
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