Relaxation study of AlGaAs cladding layers in InGaAs/GaAs (111)B lasers designed for 1.0-1.1 μm operation

InGaAs/GaAs-based lasers require thick AlGaAs cladding layers to provide optical confinement. Although the lattice mismatch between GaAs and AlGaAs is very low, relaxation may occur due to the thickness requirement for an AlGaAs waveguide of the order of microns. We have studied the relaxation of InGaAs/GaAs lasers with AlGaAs waveguides grown on GaAs (111)B substrates. We have observed by transmission electron microscopy (TEM) that certain AlGaAs layers show a high density of threading dislocations (TDs), whilst other AlGaAs layers remain essentially dislocation free. To explain the experimental results a model based on dislocation multiplication has been developed. TDs in the AlGaAs cladding layers are observed when the critical layer thickness (CLT) for dislocation multiplication has been overcome. Consequently, a design rule based on a modified CLT model for AlGaAs/GaAs (111)B is proposed. (C) 2002 Elsevier Science Ltd. All rights reserved.