High Fill Factor a-Si:H Sensor Arrays with Reduced Pixel Crosstalk

被引：0

作者：

Vygranenko, Y. ^{[1
]}

Sazonov, A. ^{[1
]}

Striakhilev, D. ^{[1
]}

Chang, J. H. ^{[1
]}

Heiler, G. ^{[1
]}

Lai, J. ^{[1
]}

Tredwell, T. ^{[1
]}

Nathan, A. ^{[1
]}

机构：

[1] ISEL, P-1950062 Lisbon, Portugal

来源：

AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008 | 2008年 / 1066卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, we report on low noise, high fill factor amorphous silicon (a-Si:H) image sensor structures for indirect radiography. Two types of the sensor arrays comprising n-i-p photodiodes and m-i-s photosensors have been fabricated. The device prototypes contain 100 x 100 pixels, with a pixel pitch of 139 mu m. The active-matrix addressing is provided by low off-current TFTs. The sensors are vertically integrated onto the TFT-backplane, by implementing a 3-mu m-thick low-k interlayer dielectric. This dielectric layer serves to reduce the data line capacitance and to planarize underlying topography. The detector was designed for reduced data-line resistance and parasitic coupling. Details of the device design and fabrication, along with sensor performance characteristics, are presented and discussed.

引用

页码：463 / +

页数：2

共 7 条

[1] Two-dimensional a-Si:H based n-i-p sensor array [J].

Chang, JH ;

Vygranenko, Y ;

Nathan, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (03) :971-974

[2]

Lai J, 2007, MATER RES SOC SYMP P, V989, P327

[3] Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays [J].

Nathan, A ;

Park, B ;

Sazonov, A ;

Tao, S ;

Chan, I ;

Servati, P ;

Karim, K ;

Charania, T ;

Striakhilev, D ;

Ma, Q ;

Murthy, RVR .

MICROELECTRONICS JOURNAL, 2000, 31 (11-12) :883-891

[4]

Safavian N, 2007, MATER RES SOC SYMP P, V989, P299

[5]

Street R.A., 2000, Technology and Applications of Amorphous Silicon, P147

[6]

Theil JA, 2003, MATER RES SOC SYMP P, V762, P271

[7] Performance analysis of a 127-micron pixel large-area TFT/photodiode array with boosted fill factor [J].

Weisfield, RL ;

Yao, W ;

Speaker, T ;

Zhou, KG ;

Colbeth, RE ;

Proano, C .

MEDICAL IMAGING 2004: PHYSICS OF MEDICAL IMAGING, PTS 1 AND 2, 2004, 5368 :338-348

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