Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating

被引:8
作者
Kim, Jong-Ahn [1 ]
Kim, Jae Wan [1 ]
Kang, Chu-Shik [1 ]
Jin, Jonghan [1 ]
Eom, Tae Bong [1 ]
机构
[1] Korea Res Inst Stand & Sci, Ctr Length, Taejon 305340, South Korea
关键词
Absolute position - Binary gratings - Circular trajectory - Compensation method - Intensity profiles - Laser interferometer - Non-linearity errors - Sinusoidal signals;
D O I
10.1063/1.4803184
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This Note presents a new absolute planar position measurement method using a two-dimensional phase-encoded binary grating and a sub-division process where nonlinearity error is compensated inherently. Two orthogonally accumulated intensity profiles of the image of the binary grating are analyzed separately to obtain the absolute position values in each axis. The nonlinearity error caused by the non-ideal sinusoidal signals in the intensity profile is compensated by modifying the configuration of the absolute position binary code and shift-averaging the intensity profile. Using an experimental setup, we measured a circular trajectory of 100 nm radius, and compared the measurement result with that of a laser interferometer. Applying the proposed compensation method, the nonlinearity error was reduced to less than 15 nm. (C) 2013 AIP Publishing LLC.
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页数:3
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