Measurement of gas flow rate from helium standard leaks

被引：3

作者：

Magielko, Henryk ^{[1
]}

机构：

[1] Tele & Radio Res Inst, PL-03450 Warsaw, Poland

来源：

MEASUREMENT | 2012年 / 45卷 / 10期

关键词：

Gas leak rate; Helium standard leaks; Method of calibration; CALIBRATION;

D O I：

10.1016/j.measurement.2011.11.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Helium standard leaks are widely used to check and calibrate mass spectrometer leak detectors. Precisely known gas flows are required for measurement of quantities of standard leak rates. A fundamental task of the constructed and presented calibration apparatus is precise measurement of gas leak rate. Thus a primary standard for calibration helium standard leaks in the range from 10(-10) to 10(-5) Pa m(3)/s has been completed at the Laboratory of Vacuum Measurements in Tele & Radio Research Institute. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：2445 / 2448

页数：4

共 5 条

[1]

Berman A., 1985, Total Pressure Measurements in Vacuum Technology

[2]

EHRLICH CD, 1992, J VAC SCI TECHNOL A, V10, P1, DOI 10.1116/1.578137

[3] METHODS FOR CALIBRATION OF STANDARD LEAKS [J].