Random Access Optical Scanning Using a MEMS Phased Array

被引：0
|
作者：
Hamann, S. S. [1 ]
Itoh, R. [2 ]
Eng, L. [3 ]
Hunter, J. [3 ]
Payne, A. [3 ]
Solgaard, O. [1 ]
机构：
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[2] SCREEN Holdings Co Ltd, R&D Dept, Fushimi Ku, 322 Furukawa Cho, Kyoto 6128486, Japan
[3] Silicon Light Machines, 820 Kifer Rd C, Sunnyvale, CA 94086 USA
来源：
2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We introduce a 1088 element MEMS phased array capable of random access scanning, such that any state can be accessed at high speed. The scanning characteristics of the phased array are demonstrated.
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页数：2
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