Formation Mechanism and Characterization of Black Silicon Surface by a Single-Step Wet-Chemical Process

被引：1

作者：

Li, Li-gong ^{[1
,3
]}

Liu, Shu-man ^{[1
]}

Yo, Xiao-ling ^{[1
]}

Hossu, Marius ^{[2
]}

Jiang, Ke ^{[2
]}

Chen, Wei ^{[2
]}

Wang, Zhan-guo ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China

[2] Univ Texas Arlington, Dept Phys, Arlington, TX 76019 USA

[3] Tsinghua Univ, Dept Phys, Beijing 100084, Peoples R China

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2012年 / 12卷 / 05期

基金：

美国国家科学基金会;

关键词：

Nanostructure; Silicon; Anodization; Electroless Deposition; SI NANOWIRES; METAL; PHOTOLUMINESCENCE; NANOPARTICLES; DEPOSITION; PARTICLE;

D O I：

10.1166/jnn.2012.5853

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report a simple single-step etching method for formation of black surface on silicon wafer by using HAuCl4-HF-H2O2 etching solution, in which catalytic Au particles were deposited in situ. The black surface suppresses the reflectivity in a wide spectral region. The formation mechanism involved has been discussed.

引用

页码：3954 / 3958

页数：5

共 20 条

[1] Nanostructured black silicon and the optical reflectance of graded-density surfaces [J].

Branz, Howard M. ;

Yost, Vernon E. ;

Ward, Scott ;

Jones, Kim M. ;

To, Bobby ;

Stradins, Paul .

APPLIED PHYSICS LETTERS, 2009, 94 (23)

[2] Metal-assisted chemical etching of silicon in HF-H2O2 [J].

Chartier, C. ;

Bastide, S. ;

Levy-Clement, C. .

ELECTROCHIMICA ACTA, 2008, 53 (17) :5509-5516

[3] In-plane control of morphology and tunable photoluminescence in porous silicon produced by metal-assisted electroless chemical etching [J].

Chattopadhyay, S ;

Li, XL ;

Bohn, PW .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (09) :6134-6140

[4]

Cross Th., 1992, SURF INTERFACE ANAL, V18, P59

[5] Metal-Assisted Chemical Etching of Silicon: A Review [J].

Huang, Zhipeng ;

Geyer, Nadine ;

Werner, Peter ;

de Boor, Johannes ;

Goesele, Ulrich .

ADVANCED MATERIALS, 2011, 23 (02) :285-308

[6] Antireflective silicon subwavelength structure formed by self-aggregated gold nano particle as a catalyst [J].

Kim, Bo-soon ;

Sung, Jun-Ho ;

Ju, Won-Ki ;

Lee, Min-Woo ;

Choi, Chul-Hyun ;

Park, Se-Geun ;

Lee, Seung-Gol ;

Lee, El-Hang ;

O, Beom-Hoan .

MICROELECTRONIC ENGINEERING, 2011, 88 (08) :2597-2600

[7] Au/Ag Bilayered Metal Mesh as a Si Etching Catalyst for Controlled Fabrication of Si Nanowires [J].

Kim, Jungkil ;

Han, Hee ;

Kim, Young Heon ;

Choi, Suk-Ho ;

Kim, Jae-Cheon ;

Lee, Woo .

ACS NANO, 2011, 5 (04) :3222-3229

[8] Black multi-crystalline silicon solar cells [J].

Koynov, Svetoslav ;

Brandt, Martin S. ;

Stutzmann, Martin .

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2007, 1 (02) :R53-R55

[9] Room temperature growth of wafer-scale silicon nanowire arrays and their Raman characteristics [J].

Kumar, Dinesh ;

Srivastava, Sanjay K. ;

Singh, P. K. ;

Sood, K. N. ;

Singh, V. N. ;

Dilawar, Nita ;

Husain, M. .

JOURNAL OF NANOPARTICLE RESEARCH, 2010, 12 (06) :2267-2276

[10] Raman spectral study of silicon nanowires [J].

Li, BB ;

Yu, DP ;

Zhang, SL .

PHYSICAL REVIEW B, 1999, 59 (03) :1645-1648

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