Phonon and electron transport through Ge2Sb2Te5 films and interfaces bounded by metals

被引:70
作者
Lee, Jaeho [1 ]
Bozorg-Grayeli, Elah [1 ]
Kim, SangBum [2 ]
Asheghi, Mehdi [1 ]
Wong, H. -S. Philip [3 ]
Goodson, Kenneth E. [1 ]
机构
[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
[2] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
[3] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
基金
美国国家科学基金会;
关键词
PHASE-CHANGE MEMORY; RANDOM-ACCESS MEMORY; THERMAL-CONDUCTIVITY; CONTACT RESISTANCE; RESISTIVITY; LIMIT;
D O I
10.1063/1.4807141
中图分类号
O59 [应用物理学];
学科分类号
摘要
While atomic vibrations dominate thermal conduction in the amorphous and face-centered cubic phases of Ge2Sb2Te5, electrons dominate in the hexagonal closed-packed (hcp) phase. Here we separate the electron and phonon contributions to the interface and volume thermal resistances for the three phases using time-domain thermoreflectance and electrical contact resistance measurements. Even when electrons dominate film-normal volume conduction (i.e., 70% for the hcp phase), their contribution to interface heat conduction is overwhelmed by phonons for high-quality interfaces with metallic TiN. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:5
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