Phonon and electron transport through Ge2Sb2Te5 films and interfaces bounded by metals

被引:70
作者
Lee, Jaeho [1 ]
Bozorg-Grayeli, Elah [1 ]
Kim, SangBum [2 ]
Asheghi, Mehdi [1 ]
Wong, H. -S. Philip [3 ]
Goodson, Kenneth E. [1 ]
机构
[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
[2] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
[3] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
基金
美国国家科学基金会;
关键词
PHASE-CHANGE MEMORY; RANDOM-ACCESS MEMORY; THERMAL-CONDUCTIVITY; CONTACT RESISTANCE; RESISTIVITY; LIMIT;
D O I
10.1063/1.4807141
中图分类号
O59 [应用物理学];
学科分类号
摘要
While atomic vibrations dominate thermal conduction in the amorphous and face-centered cubic phases of Ge2Sb2Te5, electrons dominate in the hexagonal closed-packed (hcp) phase. Here we separate the electron and phonon contributions to the interface and volume thermal resistances for the three phases using time-domain thermoreflectance and electrical contact resistance measurements. Even when electrons dominate film-normal volume conduction (i.e., 70% for the hcp phase), their contribution to interface heat conduction is overwhelmed by phonons for high-quality interfaces with metallic TiN. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:5
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共 38 条
[11]   Measurement of the thermal conductivity of nanometer scale thin films by thermoreflectance phenomenon [J].
Kuwahara, M. ;
Suzuki, O. ;
Yamakawa, Y. ;
Taketoshi, N. ;
Yagi, T. ;
Fons, P. ;
Fukaya, T. ;
Tominaga, J. ;
Baba, T. .
MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1792-1796
[12]   Formation of Ge2Sb2Te5-TiOx Nanostructures for Phase Change Random Access Memory Applications [J].
Lee, Dongbok ;
Yim, Sung-Soo ;
Lyeo, Ho-Ki ;
Kwon, Min-Ho ;
Kang, Dongmin ;
Jun, Hyun-Goo ;
Nam, Sung-Wook ;
Kim, Ki-Bum .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2010, 13 (02) :K8-K11
[13]   Phase purity and the thermoelectric properties of Ge2Sb2Te5 films down to 25 nm thickness [J].
Lee, Jaeho ;
Kodama, Takashi ;
Won, Yoonjin ;
Asheghi, Mehdi ;
Goodson, Kenneth E. .
JOURNAL OF APPLIED PHYSICS, 2012, 112 (01)
[14]   Microthermal Stage for Electrothermal Characterization of Phase-Change Memory [J].
Lee, Jaeho ;
Kim, SangBum ;
Jeyasingh, Rakesh ;
Asheghi, Mehdi ;
Wong, H. -S. Philip ;
Goodson, Kenneth E. .
IEEE ELECTRON DEVICE LETTERS, 2011, 32 (07) :952-954
[15]   Thermal conductivity anisotropy and grain structure in Ge2Sb2Te5 films [J].
Lee, Jaeho ;
Li, Zijian ;
Reifenberg, John P. ;
Lee, Sangchul ;
Sinclair, Robert ;
Asheghi, Mehdi ;
Goodson, Kenneth E. .
JOURNAL OF APPLIED PHYSICS, 2011, 109 (08)
[16]   Low thermal conductivity in Ge2Sb2Te5-SiOx for phase change memory devices [J].
Lee, Tae-Yon ;
Kim, Kijoon H. P. ;
Suh, Dong-Seok ;
Kim, Cheolkyu ;
Kang, Youn-Seon ;
Cahill, David G. ;
Lee, Dongbok ;
Lee, Min-Hyun ;
Kwon, Min-Ho ;
Kim, Ki-Bum ;
Khang, Yoonho .
APPLIED PHYSICS LETTERS, 2009, 94 (24)
[17]   AN ACCURATE METHOD TO EXTRACT SPECIFIC CONTACT RESISTIVITY USING CROSS-BRIDGE KELVIN RESISTORS [J].
LOH, WM ;
SWIRHUN, SE ;
CRABBE, E ;
SARASWAT, K ;
SWANSON, RM .
IEEE ELECTRON DEVICE LETTERS, 1985, 6 (09) :441-443
[18]   Thermal conductivity of phase-change material Ge2Sb2Te5 [J].
Lyeo, Ho-Ki ;
Cahill, David G. ;
Lee, Bong-Sub ;
Abelson, John R. ;
Kwon, Min-Ho ;
Kim, Ki-Bum ;
Bishop, Stephen G. ;
Cheong, Byung-ki .
APPLIED PHYSICS LETTERS, 2006, 89 (15)
[19]   Wiedemann-Franz law at boundaries [J].
Mahan, GD ;
Bartkowiak, M .
APPLIED PHYSICS LETTERS, 1999, 74 (07) :953-954
[20]   Role of electron-phonon coupling in thermal conductance of metal-nonmetal interfaces [J].
Majumdar, A ;
Reddy, P .
APPLIED PHYSICS LETTERS, 2004, 84 (23) :4768-4770