Integrated Thin Film Silicon Detectors for Fluorescence Sensing

被引：0
作者：
Dighe, Aditi [1 ]
Jokerst, Nan M. [1 ]
机构：
[1] Duke Univ, Dept Elect & Comp Engn, Durham, NC 27708 USA
来源：
2018 IEEE SENSORS | 2018年
基金：
美国国家科学基金会;
关键词：
photodetector; thin film; fluorescence; sensing; SENSOR;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design, fabrication and test of a thin film Si chip-scale fluorescence sensor designed for integration with microfluidic systems is reported. The photodetector has low dark current (pA) and responsivity of 0.3 A/W at 532 am. Droplets of 10 microliter with varying fluorophore concentrations were tested and the data is linear with a model fit with 95% confidence and signal to noise ratios greater than 20 dB.
引用
收藏
页码：721 / 724
页数：4
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