The carbon micro-coils were obtained with high reproducibility by the Ni-catalyzed pyrolysis of acetylene. Various novel metal carbide and nitride micro-coils, such as SiC, TaC, NbC, TiN, etc., were obtained by the vapor phase metallizing and/or nitriding of the carbon mine-coils. The preparation conditions and micro-structural and mechanical properties of these micro-coils at high temperatures were examined. It was found that the carbon micro-coils had an amorphous state and were very difficult to graphitize or vapor phase siliconize at high temperatures, while they were easy to metallize to form transition metal carbide micro-coils.