Positioning, Structuring and Controlling with Nanoprecision

被引：0

作者：

Hedderich, Regine ^{[1
,2
]}

Heiler, Tobias ^{[2
,3
,4
]}

Groeger, Roland ^{[2
,3
,4
]}

Schimmel, Thomas ^{[2
,3
,4
]}

Walheim, Stefan ^{[2
,3
,4
]}

机构：

[1] KIT, Network NanoMat, Northern Campus, D-76344 Eggenstein Leopoldshafen, Germany

[2] KIT, Inst Nanotechnol Forschungszentrum Karlsruhe, D-76344 Eggenstein Leopoldshafen, Germany

[3] Univ Karlsruhe, Karlsruhe Inst Technol KIT, Inst Appl Phys, D-76131 Karlsruhe, Germany

[4] Univ Karlsruhe, Karlsruhe Inst Technol KIT, Ctr Funct Nanostructures CFN, D-76131 Karlsruhe, Germany

来源：

PRECISION ASSEMBLY TECHNOLOGIES AND SYSTEMS | 2010年 / 315卷

关键词：

Nanotechnology; AFM; lithography; polymer blends;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Key industries such as the automotive, electronic, medical and laboratory technical industries have continually rising demands for precise manufacturing, handling and control techniques. This is true for the manufacture of injection nozzles for engines as indeed also for the irradiation of extremely fine wafer structures and in the field of scanning probe microscopy. Some examples from research and their industrial application which have been made available by NanoMat Network Partners will be highlighted in this presentation. For example the spontaneous structure formation at the nanoscale and the application as anti-reflection layers.

引用

页码：222 / +

页数：3

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