Ultra-thin titanium oxide

被引：24
作者：
Bareiss, M. [1 ]
Kaelblein, D. [2 ]
Jirauschek, C. [1 ]
Exner, A. [1 ]
Pavlichenko, I. [3 ]
Lotsch, B. [3 ]
Zschieschang, U. [2 ]
Klauk, H. [2 ]
Scarpa, G. [1 ]
Fabel, B. [1 ]
Porod, W. [4 ]
Lugli, P. [1 ]
机构：
[1] Tech Univ Munich, Inst Nanoelect, Munich, Germany
[2] Max Planck Inst Solid State Res, Stuttgart, Germany
[3] Univ Munich, Dept Chem, Munich, Germany
[4] Univ Notre Dame, Ctr Nano Sci & Technol, Notre Dame, IN 46556 USA
来源：
APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 08期
关键词：
FILMS; TIO2;
D O I：
10.1063/1.4745651
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We demonstrate the fabrication of ultra-thin titanium oxide films by plasma-induced surface oxidation. Ellipsometry measurements indicate an oxide thickness of about 2 nm. Electrical characterization was performed on microscale and nanoscale metal-insulator-metal tunneling diodes. Electrical fields up to 22 MV/cm were applied without destroying the titanium oxide films. The current-voltage-characteristic of the diodes are found to be asymmetric with respect to zero bias when employing electrodes with different work functions. The permittivity of the ultra-thin titanium oxide was determined to be less than 6, which is the smallest permittivity that has been reported for titanium oxide. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4745651]
引用
收藏
页数：4
相关论文
共 28 条
[1]   Current-controlled negative differential resistance due to Joule heating in TiO2 [J].
Alexandrov, A. S. ;
Bratkovsky, A. M. ;
Bridle, B. ;
Savel'ev, S. E. ;
Strukov, D. B. ;
Williams, R. Stanley .
APPLIED PHYSICS LETTERS, 2011, 99 (20)
[2]   Solid-state dye-sensitized mesoporous TiO2 solar cells with high photon-to-electron conversion efficiencies [J].
Bach, U ;
Lupo, D ;
Comte, P ;
Moser, JE ;
Weissörtel, F ;
Salbeck, J ;
Spreitzer, H ;
Grätzel, M .
NATURE, 1998, 395 (6702) :583-585
[3]   High-Yield Transfer Printing of Metal-Insulator-Metal Nanodiodes [J].
Bareiss, Mario ;
Ante, Frederik ;
Kaelblein, Daniel ;
Jegert, Gunther ;
Jirauschek, Christian ;
Scarpa, Giuseppe ;
Fabel, Bernhard ;
Nelson, Edward M. ;
Timp, Gregory ;
Zschieschang, Ute ;
Klauk, Hagen ;
Porod, Wolfgang ;
Lugli, Paolo .
ACS NANO, 2012, 6 (03) :2853-2859
[4]   Nano Antenna Array for Terahertz Detection [J].
Bareiss, Mario ;
Tiwari, Badri N. ;
Hochmeister, Andreas ;
Jegert, Gunther ;
Zschieschang, Ute ;
Klauk, Hagen ;
Fabel, Bernhard ;
Scarpa, Giuseppe ;
Koblmueller, Gregor ;
Bernstein, Gary H. ;
Porod, Wolfgang ;
Lugli, Paolo .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2011, 59 (10) :2751-2757
[5]   Printed array of thin-dielectric metal-oxide-metal (MOM) tunneling diodes [J].
Bareiss, Mario ;
Hochmeister, Andreas ;
Jegert, Gunther ;
Zschieschang, Ute ;
Klauk, Hagen ;
Huber, Rupert ;
Grundler, Dirk ;
Porod, Wolfgang ;
Fabel, Bernhard ;
Scarpa, Giuseppe ;
Lugli, Paolo .
JOURNAL OF APPLIED PHYSICS, 2011, 110 (04)
[6]   Performance Optimization of Antenna-Coupled Al/AlOx/Pt Tunnel Diode Infrared Detectors [J].
Bean, Jeffrey A. ;
Weeks, Arthur ;
Boreman, Glenn D. .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2011, 47 (01) :126-135
[7]   Thermal infrared detection using dipole antenna-coupled metal-oxide-metal diodes [J].
Bean, Jeffrey A. ;
Tiwari, Badri ;
Bernstein, Gary H. ;
Fay, P. ;
Porod, Wolfgang .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (01) :11-14
[8]   Direct probe of heterojunction effects upon photoconductive properties of TiO2 nanotubes fabricated by atomic layer deposition [J].
Chang, Yung-Huang ;
Liu, Chien-Min ;
Tseng, Yuan-Chieh ;
Chen, Chih ;
Chen, Chia-Chuan ;
Cheng, Hsyi-En .
NANOTECHNOLOGY, 2010, 21 (22)
[9]   Nano-TiO2-modified photosensitive resin for RP [J].
Duan Yugang ;
Zhou Yuan ;
Tang Yiping ;
Li Dichen .
RAPID PROTOTYPING JOURNAL, 2011, 17 (04) :247-252
[10]   HIGH-FIELD RELATED THIN OXIDE WEAROUT AND BREAKDOWN [J].
DUMIN, DJ ;
MOPURI, SK ;
VANCHINATHAN, S ;
SCOTT, RS ;
SUBRAMONIAM, R ;
LEWIS, TG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1995, 42 (04) :760-772
123