A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation

被引:62
作者
Cuerno, R. [1 ,2 ]
Kim, J. -S. [3 ,4 ]
机构
[1] Univ Carlos III Madrid, Dept Matemat, Leganes 28911, Spain
[2] Univ Carlos III Madrid, Grp Interdisciplinar Sistemas Complejos GISC, Leganes 28911, Spain
[3] Sook Myung Womens Univ, Dept Phys, Seoul 04310, South Korea
[4] Sook Myung Womens Univ, Inst Adv Mat & Syst, Seoul 04310, South Korea
关键词
PERIODIC STRUCTURES; TEMPORAL EVOLUTION; SELF-ORGANIZATION; RIPPLE FORMATION; SPUTTER EROSION; THIN-FILMS; KEY ROLE; MORPHOLOGY; INSTABILITY; BOMBARDMENT;
D O I
10.1063/5.0021308
中图分类号
O59 [应用物理学];
学科分类号
摘要
The formation of periodic patterns on the surfaces of many solid materials undergoing ion-beam irradiation has long been known. The advent of high resolution characterization techniques elucidated the nanoscopic traits of this self-organization process, enabling a wide range of applications for the nanostructures thus produced, from optoelectronic to biomedical. Meanwhile, full theoretical understanding of the technique has been challenged by its multiscale nature, whereby the external perturbation implemented by the ion beam acts at a much slower rate (typically, one ion arrives per square-nm every second) than the microscopic processes, like collision cascades and material transport, which try to relax such external perturbations (collision cascades or surface diffusion attempts usually relax after a few picoseconds). Here, we present a Perspective on the main developments that have led to the current understanding of nanoscale pattern formation at surfaces by ion-beam irradiation, from the points of view of experiments, applications, and theory, and offer an outlook on future steps that may eventually facilitate full harnessing of such a versatile avenue to materials nanostructuring.
引用
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页数:36
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