AlGaN/GaN heterojunction hydrogen sensor using ZnO-nanoparticles/Pd dual catalyst layer

被引：13

作者：

Choi, June-Heang ^{[1
]}

Park, Taehyun ^{[2
]}

Hur, Jaehyun ^{[2
]}

Cha, Ho-Young ^{[1
]}

机构：

[1] Hongik Univ, Sch Elect & Elect Engn, Seoul, South Korea

[2] Gachon Univ, Dept Chem & Biol Engn, Seongnam 13120, Gyeonggi, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2020年 / 325卷

基金：

新加坡国家研究基金会;

关键词：

Pd catalyst; Hydrogen sensor; ZnO nanoparticle; Nanoparticle synthesis; AlGaN/GaN heterojunction; SCHOTTKY DIODES; PD; SENSITIVITY; H-2;

D O I：

10.1016/j.snb.2020.128946

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

ZnO-nanoparticles (NPs) were investigated for improving the response characteristics of a Pd-functionalized AlGaN/GaN heterojunction-based hydrogen gas sensor. The ZnO-NPs of diameter similar to 10 nm were dispersed in a co-solvent of chloroform/ethanol (chloroform 75 %, v/v), which was found to be an optimal solution for uniform dispersion, and spin coated on the surface of the fabricated Pd/AlGaN/GaN hydrogen sensor. The ZnO-NP synthesis and dispersion methods were optimized carefully before being applied to sensor fabrication. It was observed that the addition of ZnO-NPs to the Pd catalyst enhanced the hydrogen absorption so that the response of the hydrogen sensor was improved. Compared with the single Pd catalyst layer, the ZnO-NPs/Pd double layer exhibited superior response characteristics-a response of similar to 210 % and response time of similar to 2 s were achieved at 200 degrees C with a bias voltage of 3 V.

引用

页数：8

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