Slicing parameters optimizing and experiments based on constant wire wear loss model in multi-wire saw

被引:18
作者
Li, Z. [1 ,2 ]
Wang, M. J. [1 ]
Pan, X. [2 ]
Ni, Y. M. [3 ]
机构
[1] Dalian Univ Technol, Engn Res Ctr Molding Prod, Minist Educ, Dalian 116024, Liaoning, Peoples R China
[2] Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Machining & Precis Mac, Tianjin 300222, Peoples R China
[3] Zhejiang QL Elect Sci & Technol Co Ltd, Ningbo 315800, Zhejiang, Peoples R China
关键词
Multi-wire saw; Hard brittle material; Constant wire wear loss; Wire feedback ratio;
D O I
10.1007/s00170-015-7229-5
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Multi-wire saw becomes the dominant method in slicing the hard brittle material into wafers. In this process, saw wire is the critical consumable and the dominant component of the wafer's slicing cost. However, unreasonable process parameters lead to the fact that the saw wire was not fully used. This enormously increases the wire cost. For this reason, the constant wire wear loss model is presented by taking the free abrasive wire sawing as an example. This model takes the various cutting conditions into account and ensures the whole wire wear loss to reach the preset reasonable value. Firstly, a hypothesis that there is a mapping relation between the wire wear loss and the wire slicing area during the wire lifetime is built. According to this hypothesis, the wire allowed wear loss can be transformed into wire allowed slicing area. Secondly, the calculation method is deduced based on the model. The function relation is obtained between the wire feedback ratio and the actual slicing conditions under the constraint condition of the preset wire wear allowed loss. This rational feedback ratio of wire is obtained based on the actual process parameters. Thirdly, experiments are carried out. The results indicate that the relation between wire wear loss and wire slicing area is linear under the condition of the experiments and the wire consumption is reduced obviously. Meanwhile, wafers' quality meets the requirements. This method can effectively save saw wire cost, referring to slicing other hard brittle materials by multi-wire saw.
引用
收藏
页码:329 / 334
页数:6
相关论文
共 17 条
[1]   Elasto-hydrodynamic interaction in the free abrasive wafer slicing using a wiresaw: Modeling and finite element analysis [J].
Bhagavat, M ;
Prasad, V ;
Kao, I .
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 2000, 122 (02) :394-404
[2]  
Cai YJ, 2010, INT C MECH AUT CONTR, DOI [10.1109/MACE.2010.5535709, DOI 10.1109/MACE.2010.5535709]
[3]   Evaluating and controlling silicon wafer slicing quality using fuzzy analytical hierarchy and sensitivity analysis [J].
Chang, Che-Wei ;
Wu, Cheng-Ru ;
Lin, Chin-Tsai ;
Chen, Huang-Chu .
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2008, 36 (3-4) :322-333
[4]  
Chang Mei-ru, 2006, Semiconductor Technology, V31, P176
[5]  
Feng T, 2009, EQ ELECT PROD MANUF, V175, P16
[6]   A wafer-based monocrystalline silicon photovoltaics road map: Utilizing known technology improvement opportunities for further reductions in manufacturing costs [J].
Goodrich, Alan ;
Hacke, Peter ;
Wang, Qi ;
Sopori, Bhushan ;
Margolis, Robert ;
James, Ted L. ;
Woodhouse, Michael .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2013, 114 :110-135
[7]   Scheduling wafer slicing by multi-wire saw manufacturing in photovoltaic industry: a case study [J].
Guimaraes, Luis ;
Santos, Rui ;
Almada-Lobo, Bernardo .
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2011, 53 (9-12) :1129-1139
[8]   Free abrasive wire saw machining of ceramics [J].
Hsu, C. Y. ;
Chen, C. S. ;
Tsao, C. C. .
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2009, 40 (5-6) :503-511
[9]   Effect of tensile properties on the abrasive wear of steel saw wires used for silicon ingot slicing [J].
Hwang, Bin ;
Park, Kijung ;
Kim, Hoi-Bong ;
Kim, Kwang Ho ;
Bae, Dong-Su ;
Cho, Young-Rae .
WEAR, 2012, 290 :94-98
[10]   Loss of wire tension in the wire web during the slurry based multi wire sawing process [J].
Meissner, Daniel ;
Schoenfelder, Stephan ;
Hurka, Bjoern ;
Zeh, Johannes ;
Sunder, Kirsten ;
Koepge, Ringo ;
Wagner, Thomas ;
Gruen, Andre ;
Hagel, Hans-Joachim ;
Moeller, Hans Joachim ;
Schwabe, Hartmut ;
Anspach, Oliver .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2014, 120 :346-355