Electrical and optical properties of sub-10 nm nickel silicide films for silicon solar cells

被引:7
|
作者
Brahmi, Hatem [1 ]
Ravipati, Srikanth [1 ]
Yarali, Milad [1 ]
Shervin, Shahab [2 ]
Wang, Weijie [1 ]
Ryou, Jae-Hyun [1 ,2 ,3 ]
Mavrokefalos, Anastassios [1 ]
机构
[1] Univ Houston, Dept Mech Engn, Houston, TX 77204 USA
[2] Univ Houston, Mat Sci & Engn Program, Houston, TX 77204 USA
[3] Univ Houston, Texas Ctr Superconduct, Houston, TX 77204 USA
关键词
ultra-thin film; nickel silicide; transparent conductor; reflectance; Drude-model; refractive index; p-type conductor; INDIUM TIN OXIDE; THIN-FILMS; REFRACTIVE-INDEX; TRANSPARENT; TEMPERATURE; ABSORPTION; DEPENDENCE; FREQUENCY; CONTACTS; SURFACE;
D O I
10.1088/1361-6463/50/3/035102
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly conductive and transparent films of ultra-thin p-type nickel silicide films have been prepared by RF magnetron sputtering of nickel on silicon substrates followed by rapid thermal annealing in an inert environment in the temperature range 400-600 degrees C. The films are uniform throughout the wafer with thicknesses in the range of 3-6 nm. The electrical and optical properties are presented for nickel silicide films with varying thickness. The Drude-Lorentz model and Fresnel equations were used to calculate the dielectric properties, sheet resistance, absorption and transmission of the films. These ultrathin nickel silicide films have excellent optoelectronic properties for p-type contacts with optical transparencies up to 80% and sheet resistance as low as similar to 0.15 mu Omega cm. Furthermore, it was shown that the use of a simple anti-reflection (AR) coating can recover most of the reflected light approaching the values of a standard Si solar cell with the same AR coating. Overall, the combination of ultra-low thickness, high transmittance, low sheet resistance and ability to recover the reflected light by utilizing standard AR coating makes them ideal for utilization in silicon based photovoltaic technologies as a p-type transparent conductor.
引用
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页数:10
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