Monochromatic imaging camera and technique for spatially resolved optical emission spectroscopy

Spectrally and spatially resolved optical emissions have been measured from argon plasmas in a GEC reference cell. The monochromatic imaging camera described herein records 2D images from a single wavelength of light, and the 2D images are treated by Abel inversion to produce 3D maps of single excited species in radiofrequency plasmas. Monochromatic images of argon were measured sequentially over the wavelength region from 394 to 912 nm. The camera resolves features that are separated by 1.2 nm or more in wavelength. Monochromatic imaging provides a new level of optical diagnostics for rf plasmas.