ROTOR DYNAMICS ANALYSIS AND TESTING OF A TURBOMOLECULAR PUMP ROTOR-BEARING SYSTEM

This study is focused on the dynamic characteristics of a vertical turbomolecular pump (TMP) rotor-bearing system. The research methods can be divided into two parts, which are numerical analysis and experimental measurements. In numerical analysis, we use the finite element analysis software DyRoBeS and ANSYS to construct a two- and three-dimensional models of the rotor-bearing system. In the analysis process, by using the pump system assembly testing data, we can verify the rotor-bearing system finite element models under different boundary conditions. Next, we calculate the Campbell diagram to study the dynamic characteristics of the rotor-bearing system, and to compare with the experimental results to verify the models. Finally, we found the relationship between the rotor critical speed and the bearing stiffiiess in order to study the design of the molecular pump rotor and the bearing system. Experimental measurements were divided into two parts: static modal tests and dynamic measurements. Static modal tests can provide the natural frequencies of the rotor-bearing system. Waterfall diagrams of the dynamic tests can measure the pump system critical speed from zero speed up to the working speed crossing, and to insure that the pump working speed is far from the critical speed of at least 10% in the safe margin. In summary, the results of the experimental measurements and numerical analysis can provide the basis for the design tool for turbomolecular pump rotor-bearing system in order to identify and prevent pump vibrations.