Stitching algorithm for subaperture test of convex aspheres with a test plate

被引:17
作者
Chen, Shanyong [1 ]
Zhao, Chunyu [2 ]
Dai, Yifan [1 ]
Li, Shengyi [1 ]
机构
[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, Changsha 410073, Hunan, Peoples R China
[2] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
关键词
Subaperture stitching; Convex asphere; Surface metrology; ITERATIVE ALGORITHM;
D O I
10.1016/j.optlastec.2013.01.023
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Subaperture stitching interferometry combined with a test plate is attractive for testing large convex aspheres, but the stitching algorithm is challenging because the aberrations induced by misaligned test surface or test plate are coupled with the surface figure. By relating the subaperture configuration to the overlapping deviations through ray trace and coordinate transformation, the subaperture misalignment is optimally recognized and corrected to give a minimal overlapping inconsistency in an iterative way. Allowing for misaligned test plate, we decompose the induced aberrations into three parts which are corrected by the stitching algorithm, removed in the form of the Zernike polynomials and left uncorrected as residuals. Finally we present simulation results of testing a convex aspheric mirror with a computer generated hologram which shows the algorithm successfully retrieves the surface figure with the test mirror or the hologram misaligned. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:307 / 315
页数:9
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