Effect of glass tempering on microstructure and functional properties of SnO2:F thin film prepared by atmosphere pressure chemical vapor deposition

被引：15
作者：
Gao, Qian [1 ,2 ]
Liu, Qiying [3 ]
Li, Ming [1 ,2 ]
Li, Xiang [1 ,2 ]
Liu, Yong [1 ,2 ]
Song, Chenlu [1 ,2 ]
Wang, Jianxun [1 ,2 ]
Liu, Junbo [3 ]
Shen, Ge [1 ,2 ]
Han, Gaorong [1 ,2 ]
机构：
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, Ctr Electron Microscopy, Dept Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
[3] Hangzhou Bluestar New Mat Technol Co Ltd, Hangzhou 310012, Zhejiang, Peoples R China
来源：
THIN SOLID FILMS | 2013年 / 544卷
基金：
中国国家自然科学基金;
关键词：
Fluorine-doped tin oxide; Sandwich structure; Low-emission property; Glass tempering; TIN OXIDE-FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; SCATTERING MECHANISM; HIGHLY TRANSPARENT; ROOM-TEMPERATURE; SPRAY-PYROLYSIS; GAS SENSORS; ABSORPTION;
D O I：
10.1016/j.tsf.2013.02.099
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The low-emission glass was prepared via depositing fluorine-doped tin oxide thin film on glass substrate by atmospheric pressure chemical vapor deposition method. The as-deposited low-emission glass was found to present a SnO2:F/SiCxOy/glass sandwich structure via focused ion beam technique and transmission microscopic measurement. After tempering process at similar to 650 degrees C with varied periods, the electrical and optical properties of the SnO2:F thin film remained stable for less than 10 min, but decreased dramatically when the tempering period exceeded 10 min, which was mainly due to the oxygen chemisorptions and fluorine ion diffusion. It was observed that the SnO2:F thin films presented uniform polycrystalline nature of cassiterite structure throughout the tempering process. The study has therefore suggested the appropriate tempering conditions for the SnO2:F low-emission glass, and provided a critical guidance for further energy-saving glass applications. (C) 2013 Elsevier B. V. All rights reserved.
引用
收藏
页码：357 / 361
页数：5
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