A MEMS GRAVIMETER QUALIFIED FOR EARTH TIDES MEASUREMENT

被引：0

作者：

Tang, ShiHao ^{[1
,2
,3
]}

Liu, HuaFeng ^{[1
,2
,3
]}

Yan, ShiTao ^{[1
,2
,3
]}

Xu, XiaoChao ^{[1
,2
,3
]}

Wu, WenJie ^{[1
,2
,3
]}

Tu, LiangCheng ^{[1
,2
,3
,4
]}

机构：

[1] Huazhong Univ Sci & Technol, MOE Key Lab Fundamental Phys Quant Measurement, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, Hubei Key Lab Gravitat & Quantum Phys, PGMF, Wuhan 430074, Peoples R China

[3] Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China

[4] Huazhong Univ Sci & Technol, Inst Geophys, Wuhan 430074, Peoples R China

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

关键词：

Microelectromechanical systems (MEMS); Gravimeter; Earth tides; Optical displacement transducer; GRAVITY;

D O I：

10.1109/transducers.2019.8808444

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a MEMS gravimeter that is sensitive and stable enough to observe earth tides. A novel quasi-zero stiffness suspension, which includes a curved beam and two folded beams, is used to achieve an ultra-low resonant frequency of 10 Hz. The measured acceleration noise floor of the MEMS gravimeter is 20 mu Gal/root Hz at 1 Hz. The MEMS gravimeter shows a good agreement with the theoretical model for earth tides measurements. The results indicate that the proposed MEMS gravimeter is qualified for earth tides measurement and is promising to be a very low-cost gravimeter.

引用

页码：499 / 502

页数：4

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