White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error

被引：1

作者：

Song, Ningfang ^{[1
]}

Li, Jiao ^{[1
]}

Li, Huipeng ^{[1
]}

Luo, Xinkai ^{[1
]}

机构：

[1] Beihang Univ, Sch Instrumentat Sci Optoelect Engn, Beijing 100191, Peoples R China

来源：

AOPC 2015: OPTICAL TEST, MEASUREMENT, AND EQUIPMENT | 2015年 / 9677卷

关键词：

White light phase-stepping interferometry; Periodic systematic error; Five-frame algorithm; SHIFT INTERFEROMETRY;

D O I：

10.1117/12.2199617

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Periodic systematic error caused by erroneous reference phase adjustments and instabilities of interferometer has a great influence on precision of measurement micro-profile using white light phase-stepping interferometry. This paper presents a five-frame algorithm that is insensitive to periodic systematic error. This algorithm attempts to eliminate the periodic systematic error when calculating the phase. Both theoretical and experimental results show that the proposed algorithm has good immunity to periodic systematic error and is able to accurately recover the 3D profile of a sample.

引用

页数：6

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