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Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor
被引:218
作者:

Ou, Lang-Xi
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Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

Liu, Meng-Yang
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Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

Zhu, Li-Yuan
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Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

Zhang, David Wei
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机构:
Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

Lu, Hong-Liang
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机构:
Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
Fudan Univ, Yiwu Res Inst, Chengbei Rd, Yiwu City 322000, Zhejiang, Peoples R China Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
机构:
[1] Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[2] Fudan Univ, Yiwu Res Inst, Chengbei Rd, Yiwu City 322000, Zhejiang, Peoples R China
基金:
中国国家自然科学基金;
国家重点研发计划;
关键词:
Metal oxide semiconductor;
Flexible gas sensor;
Room temperature;
Nanomaterials;
VOLATILE ORGANIC-COMPOUNDS;
LIQUEFIED PETROLEUM GAS;
ZNO NANORODS;
NO2;
SENSOR;
COMPOUNDS VOCS;
PERFORMANCE EVALUATION;
WEARABLE ELECTRONICS;
ENHANCED SENSITIVITY;
SENSING PERFORMANCE;
PET SUBSTRATE;
D O I:
10.1007/s40820-022-00956-9
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
With the rapid development of the Internet of Things, there is a great demand for portable gas sensors. Metal oxide semiconductors (MOS) are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors. However, it is limited by high operating temperature. The current research works are directed towards fabricating high-performance flexible room-temperature (FRT) gas sensors, which are effective in simplifying the structure of MOS-based sensors, reducing power consumption, and expanding the application of portable devices. This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism, performance, flexibility characteristics, and applications. This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors, including pristine MOS, noble metal nanoparticles modified MOS, organic polymers modified MOS, carbon-based materials (carbon nanotubes and graphene derivatives) modified MOS, and two-dimensional transition metal dichalcogenides materials modified MOS. The effect of light-illuminated to improve gas sensing performance is further discussed. Furthermore, the applications and future perspectives of FRT gas sensors are also discussed.
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