How to verify incident implant angles on medium current implants

被引：0
|
作者：
Isaacs, Bobby [1 ]
Cornell, Anya [2 ]
机构：
[1] Texas Instruments Inc, DMOSS Mfg site, Dallas, TX 75265 USA
[2] Texas Instruments Inc, MFAB Mfg site, Portland, ME USA
来源：
SOLID STATE TECHNOLOGY | 2013年 / 56卷 / 07期
关键词：
4;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：12 / 16
页数：5
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