Calibration of oblique-incidence reflectivity difference for label-free detection of a molecular layer

被引：7
作者：
Zhu, Chenggang [1 ]
Chen, Ru [1 ]
Zhu, Yuzhangyang [1 ]
Wang, Xu [2 ]
Zhu, Xiangdong [3 ]
Mi, Lan [1 ]
Zheng, Fengyun [4 ]
Fei, Yiyan [1 ]
机构：
[1] Fudan Univ, Key Lab Micro & Nano Photon Struct, Shanghai Engn Res Ctr Ultraprecis Opt Mfg, Dept Opt Sci & Engn,Green Photoelect Platform,Min, Shanghai 200433, Peoples R China
[2] Wuxi Inst Technol, Dept Fundamental Courses, Wuxi 214121, Peoples R China
[3] Univ Calif Davis, Dept Phys, Davis, CA 95616 USA
[4] Fudan Univ, Inst Biomed Sci, Shanghai 200032, Peoples R China
来源：
APPLIED OPTICS | 2016年 / 55卷 / 33期
基金：
中国国家自然科学基金;
关键词：
PHOTOELASTIC MODULATOR; PHASE MODULATION; ELLIPSOMETER; REFLECTANCE; MICROARRAYS; BINDING; ELECTRODEPOSITION; ADSORPTION; DESORPTION; GROWTH;
D O I：
10.1364/AO.55.009459
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Oblique-incidence reflectivity difference (OI-RD) is a form of polarization-modulation ellipsometry that measures properties of thin films on a solid surface through the change in polarization state of light upon reflection from the surface. The measurement accuracy depends on the precision of the phase modulation amplitude and azimuthal alignments of key polarizing optical elements and, thus, requires careful calibration. In the present work, we describe robust methods of such calibrations that enable precise determination of the modulation amplitude and static retardation of a phase modulator and azimuths of key polarizing optics in an OI-RD system. (C) 2016 Optical Society of America
引用
收藏
页码：9459 / 9466
页数：8
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