Tracking control of a biaxial piezo-actuated positioning stage using generalized Duhem model

被引:107
作者
Lin, Chih-Jer [1 ]
Lin, Po-Ting [1 ]
机构
[1] Natl Taipei Univ Technol, Grad Inst Automat Technol, Taipei 10608, Taiwan
关键词
Hysteresis; Piezo-actuator; Duhem model; Dahl model; Bouc-Wen model; Particle swarm optimization; DESIGN; SCANNER;
D O I
10.1016/j.camwa.2011.12.015
中图分类号
O29 [应用数学];
学科分类号
070104 ;
摘要
Nonlinear hysteresis modeling is studied using a novel PZT-actuated flexure-based mechanism. To compare the performance of variant hysteresis models with respect to the tracking reference, we reformulate the Bouc-Wen model, the Dahl model and the Duhem model as a generalized Duhem model. System parameters for these three hysteresis models are formulated into nonlinear optimization problems with constraints. These optimization problems are solved by the particle swarm optimization method. Since the Duhem model includes both electrical and mechanical domains, it has a smaller modeling error compared to the other two hysteresis models. The simulation results are confirmed by modeling the proposed biaxial piezo-actuated positioning stage of these hysteresis models. Cross-coupling effects between the X- and Y-axis actuation are also alleviated by a novel feedforward compensation mechanism based on the Duhem model with crossover terms. Finally, a real-time experiment is performed to confirm the feasibility of the proposed method. The experimental results validate the capability of the proposed controller to achieve precision tracking tasks with submicron precision. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:766 / 787
页数:22
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