A fibre-optic surface-roughness sensor

被引:17
作者
Persson, U [1 ]
机构
[1] Mid Sweden Univ, Elect Opt Lab, Dept Informat Technol, SE-83125 Ostersund, Sweden
关键词
surface roughness; light scattering; fibre; machined surface;
D O I
10.1016/S0924-0136(99)00262-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A technique applicable to surface-roughness measurement in limited spaces is presented. The measurement principle is Light scattering, the surface under test being illuminated using a He-Ne laser, lambda = 632.8 nm, with the light being lead to the surface by an optical fibre. The light scattered by the surface is lead by a fibre to a detector. This arrangement makes a very small system possible, a system that can be used to make relative surface-roughness measurements inside a tube or a cylinder. The experimental results presented in this paper show the applicability of this sensor. The surfaces were classified in the same order as when using a stylus instrument. Surfaces in the range of 10 nm < R-a < 200 nm were measured, R-a being the arithmetical mean deviation of the profile. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:107 / 111
页数:5
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