Microscale Fracture Behavior of Single Crystal Silicon Beams at Elevated Temperatures

被引：59

作者：

Jaya, Balila Nagamani ^{[1
]}

Wheeler, Jeffrey M. ^{[2
]}

Wehrs, Juri ^{[3
]}

Best, James P. ^{[3
]}

Soler, Rafael ^{[1
]}

Michler, Johann

Kirchlechner, Christoph ^{[1
,3
,4
]}

Dehm, Gerhard ^{[1
]}

机构：

[1] Max Planck Inst Eisenforsch GmbH, Struct & NanoMicromech Mat, Max Planck Str 1, D-40237 Dusseldorf, Germany

[2] Swiss Fed Inst Technol, Lab Nanomet, Dept Mat, Vladimir Prelog Weg 5, CH-8093 Zurich, Switzerland

[3] Empa, Swiss Fed Labs Mat Sci & Technol, Lab Mech Mat & Nanostruct, Feuerwerkerstr 39, CH-3602 Thun, Switzerland

[4] Univ Leoben, Dept Mat Phys, A-8700 Leoben, Austria

来源：

NANO LETTERS | 2016年 / 16卷 / 12期

基金：

瑞士国家科学基金会;

关键词：

Microscale fracture; brittle-to-ductile transition; fracture toughness; single crystal silicon; BRITTLE-DUCTILE TRANSITION; MECHANICAL-BEHAVIOR;

D O I：

10.1021/acs.nanolett.6b03461

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The micromechanical fracture behavior of Si [100] was investigated as a function of temperature in the scanning electron microscope with a nanoindenter. A gradual increase in K-C was observed with temperature, in contrast to sharp transitions reported earlier for macro Si. A transition in cracking mechanism via crack branching occurs at similar to 300 degrees C accompanied by multiple load drops. This reveals that onset of small-scale plasticity plays an important role in the brittle-to-ductile transition of miniaturized Si.

引用

页码：7597 / 7603

页数：7

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