In Situ Localized Growth of Porous Tin Oxide Films on Low Power Microheater Platform for Low Temperature CO Detection

被引：68

作者：

Long, Hu ^{[1
,2
,5
]}

Harley-Trochimczyk, Anna ^{[1
,2
]}

He, Tianyi ^{[2
,3
]}

Thang Pham ^{[4
,6
,7
,8
]}

Tang, Zirong ^{[5
]}

Sho, Tielin ^{[5
]}

Zettl, Alex ^{[4
,6
,7
,8
]}

Mickelson, William ^{[2
,4
]}

Carraro, Carlo ^{[1
,2
]}

Maboudian, Roya ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Chem & Biomol Engn, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[4] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[5] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[6] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA

[7] Univ Calif Berkeley, Kavli Energy NanoSci Inst, Berkeley, CA 94720 USA

[8] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

来源：

ACS SENSORS | 2016年 / 1卷 / 04期

基金：

美国国家科学基金会;

关键词：

gas sensors; in situ synthesis; low power; microheater; nanocrystalline tin oxide; CO sensor; THIN-FILM; FAST-RESPONSE; GAS SENSORS; CARBON; METAL; NANOTUBES; PLATINUM;

D O I：

10.1021/acssensors.5b00302

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This paper reports a facile method for creating a nanostructured metal oxide film on a low power microheater sensor platform and the direct realization of this structure as a gas sensor. By fast annealing the deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in situ and locally on the sensor platform. With only minimal processing, a high performance, miniaturized gas sensor is ready for use. A carbon monoxide sensor using the in situ synthesized porous tin oxide (SnO2) sensing film is made as a demonstration of this technique. The sensor exhibits a low detection limit and fast response and recovery time at a low operating temperature. This facile fabrication method is highly flexible and has great potential for large-scale gas sensor fabrication.

引用

页码：339 / 343

页数：5

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