Biaxially oriented CaF2 films on amorphous substrates

被引：34

作者：

Li, H. -F. ^{[1
]}

Parker, T. ^{[1
]}

Tang, F. ^{[1
]}

Wang, G. -C. ^{[1
]}

Lu, T. -M. ^{[1
]}

Lee, S. ^{[2
]}

机构：

[1] Rensselaer Polytech Inst, Sci Ctr 1C25, Dept Phys Appl Phys & Astron, Troy, NY 12180 USA

[2] USA, Armament Res, Dev & Engn Ctr, Benet Labs, Watervliet, NY 12189 USA

来源：

JOURNAL OF CRYSTAL GROWTH | 2008年 / 310卷 / 15期

关键词：

crystal morphology; crystal structure; nanostructures; physical vapor deposition process; calcium compounds;

D O I：

10.1016/j.jcrysgro.2008.04.040

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Biaxially oriented CaF2 films have been created by first using an oblique incidence vapor flux to deposit CaF2 onto an amorphous surface to form vertically aligned nanorods which served as seeds to grow a more continuous CaF2 capping layer under a subsequent normal incidence flux deposition. The entire film possesses a unique {111} < 121 > biaxial texture as shown by X-ray pole figure analysis and transmission electron microscopy (TEM). This unique texture formation is a result of shadowing and surface diffusion effects. This biaxially oriented film on an amorphous substrate may be useful as a buffer layer to grow active semiconductor devices. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：3610 / 3614

页数：5

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