Cathodic localization of metal coatings on silicon carbide crystals

被引:1
作者
Karachinov, VA [1 ]
机构
[1] Novosibirsk State Univ, Velikii Novgorod, Russia
关键词
Copper; Silicon; Experimental Data; Carbide; Electrical Property;
D O I
10.1134/1.1482761
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experimental data on the electrical properties of metal contacts fabricated by depositing copper from a porous electrode onto the surface of silicon carbide crystals are reported. (C) 2002 MAIK "Nauka/Interperiodica".
引用
收藏
页码:439 / 440
页数:2
相关论文
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Vodakov Yu. A., 1981, Soviet Technical Physics Letters, V7, P301
[12]  
YAMPOLSKII AM, 1981, CONCISE HDB ELECTROP