Estimation of unknown structure parameters from high-resolution (S)TEM images: What are the limits?

被引：43
作者：
den Dekker, A. J. [1 ]
Gonnissen, J. [2 ]
De Backer, A. [2 ]
Sijbers, J. [3 ]
Van Aert, S. [2 ]
机构：
[1] Delft Univ Technol, Delft Ctr Syst & Control, NL-2628 CD Delft, Netherlands
[2] Univ Antwerp, B-2020 Antwerp, Belgium
[3] Univ Antwerp, Vis Lab, B-2610 Antwerp, Belgium
来源：
ULTRAMICROSCOPY | 2013年 / 134卷
关键词：
High resolution transmission electron microscopy (HRTEM); Electron microscope design and characterization; Data processing/image processing; MAXIMUM-LIKELIHOOD-ESTIMATION; ELECTRON-MICROSCOPY IMAGES; EXPERIMENTAL-DESIGN; Z-CONTRAST; ATOMIC-SCALE; COHERENT; PRECISION; OPTIMIZE;
D O I：
10.1016/j.ultramic.2013.05.017
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Statistical parameter estimation theory is proposed as a quantitative method to measure unknown structure parameters from electron microscopy images. Images are then purely considered as data planes from which structure parameters have to be determined as accurately and precisely as possible using a parametric statistical model of the observations. For this purpose, an efficient algorithm is proposed for the estimation of atomic column positions and intensities from high angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) images. Furthermore, the so-called Cramer-Rao lower bound (CRLB) is reviewed to determine the limits to the precision with which continuous parameters such as atomic column positions and intensities can be estimated. Since this lower bound can only be derived for continuous parameters, alternative measures using the principles of detection theory are introduced for problems concerning the estimation of discrete parameters such as atomic numbers. An experimental case study is presented to show the practical use of these measures for the optimization of the experiment design if the purpose is to decide between the presence of specific atom types using STEM images. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：34 / 43
页数：10
相关论文
共 54 条
[41]   High-resolution electron microscopy: From imaging toward measuring [J].
Van Aert, S ;
den Dekker, AJ ;
van den Bos, A ;
Van Dyck, D .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2002, 51 (04) :611-615
[42]   High-resolution electron microscopy and electron tomography: resolution versus precision [J].
Van Aert, S ;
den Dekker, AJ ;
Van Dyck, D ;
van den Bos, A .
JOURNAL OF STRUCTURAL BIOLOGY, 2002, 138 (1-2) :21-33
[43]   Quantitative atomic resolution mapping using high-angle annular dark field scanning transmission electron microscopy [J].
Van Aert, S. ;
Verbeeck, J. ;
Erni, R. ;
Bals, S. ;
Luysberg, M. ;
Van Dyck, D. ;
Van Tendeloo, G. .
ULTRAMICROSCOPY, 2009, 109 (10) :1236-1244
[44]   Optimal experimental design of STEM measurement of atom column positions [J].
Van Aert, S ;
den Dekker, AJ ;
Van Dyck, D ;
van den Bos, A .
ULTRAMICROSCOPY, 2002, 90 (04) :273-289
[45]  
Van Aert S, 2001, PHILOS MAG B, V81, P1833, DOI 10.1080/13642810110079674
[46]  
Van Aert S., 2003, THESIS DELFT U TECHN
[47]   Direct Observation of Ferrielectricity at Ferroelastic Domain Boundaries in CaTiO3 by Electron Microscopy [J].
Van Aert, Sandra ;
Turner, Stuart ;
Delville, Remi ;
Schryvers, Dominique ;
Van Tendeloo, Gustaaf ;
Salje, Ekhard K. H. .
ADVANCED MATERIALS, 2012, 24 (04) :523-+
[48]   Three-dimensional atomic imaging of crystalline nanoparticles [J].
Van Aert, Sandra ;
Batenburg, Kees J. ;
Rossell, Marta D. ;
Erni, Rolf ;
Van Tendeloo, Gustaaf .
NATURE, 2011, 470 (7334) :374-377
[49]  
van den Bos A., ADV IMAGING ELECT PH, V117, P241
[50]   Throughput maximization of particle radius measurements through balancing size versus current of the electron probe [J].
Van den Broek, W. ;
Van Aert, S. ;
Goos, P. ;
Van Dyck, D. .
ULTRAMICROSCOPY, 2011, 111 (07) :940-947
123456