Thermal balance of tungsten monocrystalline nanoparticles in high pressure magnetron discharges

被引：9

作者：

Arnas, C. ^{[1
]}

Chami, A. ^{[1
]}

Couedel, L. ^{[1
,2
]}

Acsente, T. ^{[3
]}

Cabie, M. ^{[4
]}

Neisius, T. ^{[4
]}

机构：

[1] Aix Marseille Univ, CNRS, PIIM, F-13397 Marseille, France

[2] Univ Saskatchewan, Dept Phys & Engn Phys, Saskatoon, SK S7N 5E2, Canada

[3] Natl Inst Laser Plasma & Radiat Phys, Magurele 077125, Romania

[4] Aix Marseille Univ, Cent Marseille, CNRS, FSCM,CP2M, F-13397 Marseille, France

来源：

PHYSICS OF PLASMAS | 2019年 / 26卷 / 05期

关键词：

PHASE-TRANSFORMATION; DUST PARTICLES; SPUTTER-DEPOSITION; OPTICAL-PROPERTIES; THIN-FILMS; RADIOFREQUENCY; TRANSPORT; PLASMA; SHAPE;

D O I：

10.1063/1.5095932

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Nanoparticles are produced in sputtering magnetron discharges operating with a tungsten cathode at an argon pressure of 30 Pa. Structure analyses show that they are of core-shell type. The core is a monocrystal mainly in the metastable beta-tungsten phase, and the shell is made of tungsten oxide. The origin of the metastable phase is attributed to the presence of residual oxygen in the device. Since this phase transforms into the stable alpha-tungsten phase by annealing, a standard model on the thermal balance of nanoparticles was used to find the temperature that they can reach under the considered experimental conditions. It is shown that this temperature is significantly higher than the gas one but not high enough to transform the monocrystalline metastable beta-phase during the plasma process.

引用

页数：8

共 52 条

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