Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

被引：105

作者：

Tian, Wei-Cheng ^{[1
,2
,3
]}

Ho, Yu-Hsuan ^{[2
]}

Chen, Chao-Hao ^{[2
,3
]}

Kuo, Chun-Yen ^{[3
]}

机构：

[1] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan

[2] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10617, Taiwan

[3] Natl Taiwan Univ, Grad Inst Biomed Elect & Bioinformat, Taipei 10617, Taiwan

来源：

SENSORS | 2013年 / 13卷 / 01期

关键词：

temperature effect; TiO2; nanowire; gas sensors; electro-beam lithography; OXIDE; ENHANCEMENT; ARRAY;

D O I：

10.3390/s130100865

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 degrees C. At the optimized temperature of 300 C, the proposed sensor repeatedly obtained a rise/recovery time (Delta R: 0.9 R-0 to 0.1 R-0) of 3.2/17.5 s and a corresponding sensor response (Delta R/R-0) of 21.7% at an ethanol injection mass quantity of 0.2 mu g.

引用

页码：865 / 874

页数：10

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