Influence of the different processing steps on the microstructure of PZT-based multilayer

被引：3

作者：

Solera, E ^{[1
]}

Jardiel, T ^{[1
]}

Villegas, M ^{[1
]}

Fernández, JF ^{[1
]}

机构：

[1] CSIC, Inst Ceram & Vidrio, Dept Electroceram, Madrid 28500, Spain

来源：

BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO | 2002年 / 41卷 / 01期

关键词：

rheology; tape-casting; multilayer; PZT;

D O I：

10.3989/cyv.2002.v41.i1.717

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A comparative study of the influence of both rheological and processing parameters on the microstructure and reliability of multilayer ceramic chips based on PZT has been conducted. The multilayer chips were obtained by tape casting. Viscosity measurements of different slurries with various solids content have been correlated with both the thickness and the green density of the casted layers. The critical points of the thermal treatments, organics burn-out and sintering, have been identified. The green microstructure of the layers and the final microstructure of the sintered chips have been studied by SEM.

引用

页码：166 / 170

页数：5

共 14 条

[1] DESTRUCTION MECHANISMS IN CERAMIC MULTILAYER ACTUATORS
ABURATANI, H
HARADA, S
UCHINO, K
FURUTA, A
FUDA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5B): : 3091 - 3094
[2] Effect of powder characteristics on densification of PZT ceramics.
Celi, LA
Caballero, AC
Villegas, M
Durán, P
Moure, C
Fernández, JF
[J]. BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 1999, 38 (05): : 493 - 497
[3] MULTILAYER PIEZOELECTRIC CERAMICS FOR 2-DIMENSIONAL ARRAY TRANSDUCERS
GOLDBERG, RL
SMITH, SW
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1994, 41 (05) : 761 - 771
[4] FABRICATION OF THIN CERAMIC SHEETS FOR CAPACITORS
HOWATT, GN
BRECKENRIDGE, RG
BROWNLOW, JM
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1947, 30 (08) : 237 - 242
[5] HYATT EP, 1986, AM CERAM SOC BULL, V65, P637
[6] JIMENEZ J, 1994, BOL SOC ESP CERAM V, V33, P44
[7] MISTLER RE, 1990, AM CERAM SOC BULL, V69, P1022
[8] Moreno R., 1992, BOL SOC ESP CERAM V, V31, P99
[9] RUNK RB, 1975, AM CERAM SOC BULL, V54, P199
[10] MULTILAYER PIEZOELECTRIC CERAMIC ACTUATOR WITH VARYING THICKNESS LAYERS
TAKAHASHI, S
YANO, T
FUKUI, I
SATO, E
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 : 206 - 208

← 1 2 →