Re-poling process for piezoelectric-based multilayer ceramic capacitors force sensor

被引：11
作者：
Lin, Keng-Ren [1 ,2 ]
Chang, Chih-Han [1 ,2 ]
Chiang, Cheng-Hung [3 ]
Lin, Che-Hsin [3 ]
机构：
[1] Natl Cheng Kung Univ, Dept Biomed Engn, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Innovat Ctr Adv Med Device Technol, Tainan 701, Taiwan
[3] Natl Sun Yat Sen Univ, Dept Mech & Electromech Engn, Kaohsiung 804, Taiwan
来源：
APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 14期
关键词：
BARIUM-TITANATE; PRESSURE; SKIN;
D O I：
10.1063/1.4801499
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This study presents an industrial-grade piezoelectric-based multilayer ceramic capacitors (MLCCs) force sensor. In order to increase the sensitivity and reduce the variation of different MLCCs, a simple re-poling process is adopted by applying an external electric field at the Curie temperature of MLCCs. Results indicate that the re-poling treatment improved up to 100-fold for the force detection sensitivity and reduced the variation for the output force response by 10-fold in comparison with the MLCC sensors without re-poling. (C) 2013 AIP Publishing LLC.
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页数：4
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