Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings

被引：7
作者：
Zhang, Xuhai [1 ]
Li, Juan [1 ]
Xiao, Jingcai [1 ]
Pi, Jinhong [2 ]
He, Guangyu [3 ]
Chen, Long [1 ]
Zeng, Yuqiao [1 ]
Jiang, Jianqing [1 ,4 ]
机构：
[1] Southeast Univ, Jiangsu Key Lab Adv Metall Mat, Sch Mat Sci & Engn, Nanjing 211189, Jiangsu, Peoples R China
[2] Nanjing Inst Technol, Sch Mat Sci & Engn, Nanjing 211167, Jiangsu, Peoples R China
[3] Air Force Engn Univ, Mat Sci & Technol Plasma Dynam Lab, Xian 710038, Shaanxi, Peoples R China
[4] Nanjing Forestry Univ, Nanjing 210037, Jiangsu, Peoples R China
来源：
SURFACE & COATINGS TECHNOLOGY | 2019年 / 362卷
基金：
美国国家科学基金会;
关键词：
TiAlSiCN coatings; Magnetron sputtering; Nanocomposite; Hardness; Microstructure; TIALN COATINGS; WEAR; NANOCOMPOSITE; TIN; CORROSION; BEHAVIOR; RATIO; TICN;
D O I：
10.1016/j.surfcoat.2019.01.056
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
TiAlSiCN coatings were deposited by radio frequency reactive magnetron co-sputtering. In the coatings, the Si content is tuned by using targets with different Si additions. The structures and mechanical properties of the TiAlSiCN coatings were strongly depended on the Si content. The Si similar to 3 at.% sample exhibits the highest hardness of 38 GPa among the coatings prepared in this work. The nanocomposite microstructure containing B1-TiN nanocrystals with C:N approximate to 1:1 and combined C, SiNx and SiCx amorphous phases is attributed to the enhanced hardness.
引用
收藏
页码：21 / 26
页数：6
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